Choosing a Control Method for a Wafer Heater in Automated Equipment

https://thermal-element-journal.juniperbrief.com/posts/wafer-heater-applications-across-semiconductor-processing-stages

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result